ITE SIEMENS SCF-B20-120 目前国内先进的等离子体设备使用的射频电源,其主要技术性能(如输出功率、频率,阻抗匹配网络等)已和国外同类电源基本一致,但在自动化程度上,体积上以及应用领域方面还有一定的差距。因此,要跟上国际水平,还要开展以下一些工作。
1、现在国内的射频电源采用的都是电子管或电子管、晶体管混合电路,体积较天,在一些要考虑体积的地方,限制了它的应用。因而需要采用新技术、新元器件,使射频电源固态化,小型化。
Slit Valve/Wide Body Chamber
ASML /SVG 4022.451.2556/4022.484.9561
ASML /SVG 4022.481.2556/4022.484.9562
ASML / SVG Green Laser Head 4022.455.0986
Blue M Thermal Shock Chamber WSP-109C-MP3
Applied Materials AMAT 0090-91590ITL 0100-90451
ASML 4022.472.1994
ASML 4022.472.4037
AMAT 70312800400
EDAX Detecting Unit PV9760/38 CM12 155-10
AMAT Applied Materials Chamber 5000 CVD A079C
Tokyo Electron PB122-U300-02
Canon Stepper Part KB-02
SVG/ASML 859-0534-005
ASML/SVG 4022.484.8223.3
ASML 4022.455.0280.3
ASML 4022.455.0280.2
LAM Research Drive Assy. 852-031462-001-1-321
LAM Research Drive Assy. 852-011050-101-3-2315
LAM Research Drive Assy. 852-210011-004-5-DFT
Sylvania HBO 1500W/CI i-line lamp HBO1500W/CI
Adept Technology 30332-22350/10332-22000
Asyst Pre-Aligner Model 5 05050-017
Air Products 801-4700769
Plas-LAB ICS Oxygen Chamber E 341258
Label-AIRE Inc. Model 2138-B42 62 inches
Air Products 801-4704730
Beckman J2-21
Baldor DC Motor W/Camco Rotary index and Camco Gear
Liebert UPStation S3 16KVA S3
ADC 5000 Series Gas Analyzer
HSH1500CIEO HSH 1500 CIEO Replaces